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Current contact address
| Country | Ukraine |
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| City | Kiev |
| Institution | National Academy of Sciences of Ukraine |
| Institute | V. Lashkarev Institute of Semiconductor Physics, Physical Principles of Integrated Microelectronics |
Profile
| Research fields | Semiconductor Physics,Synthesis and Properties of Functional Materials |
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| Keywords | Substoichiometric Si oxide, Interface layer, SiO2 precipitates, Thermodynamics, Gibbs free energy |